Beam Displacement (mm)

6.67 

6.67 

6.67 

Repeated Positioning Accuracy (µrad)

＜1

＜1

＜1

Zero Drift (µrad/K)

＜15

＜15

＜15

Gain Drift（ppm/K)

＜8

＜8

＜8

Long-term drift over 8 hours (mrad)

＜0.1

＜0.1

＜0.1

Tuning

P1

P1

P2

P1

Tracking Error (ms)

0.115

0.138

0.140

0.167

1% Of Full Scale (ms)

0.26

0.28

0.40

0.34

10% Of Full Scale (ms)

0.81

1.18

1.686

1.43

Positioning Speed (m/s)

25

20

20

20

Scanning Speed (mm/s)

<6000

<5000

<10000

<2500

Fine Processing Speed (rad/s)

<37.5

<31.25

<62.5

<15.63

Zero Offset (mrad)

<5

<5

<5

Typical Scan Angle (°)

±22

±22

±22

Nonlinearity (%)

<0.1

<0.1

<0.1

Power Requirements

±15VDC, ≥3A

±15VDC, ≥3A

±15VDC, ≥3A

Communication Protocol

XY2-100

/SH2-100(20bits)

XY2-100

/SH2-100(20bits)

XY2-100

/SH2-100(20bits)

Operation Temperature (℃)

25±10

25±10

25±10